ECM4

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Session 25: ATOMIC LAYER DEPOSITION TECHNOLOGY

Note: We assume all delegates attend the full 3-day conference. The times/dates shown on the website are tentative for conference scheduling, and subject to change before 20th July 2015, Final schedule will be confirmed on 21st July 2015.

Session 25B, 11th August 2015, 13:40-15:25
Moderator: Dr. Hossein (Zane) Zeinali, University of Alberta, Canada

Modeling the Precursor Utilization in Atomic Layer Deposition on Nanostructured Materials in Fluidized Bed Reactors (25 minutes) Abstract

Fabio Grillo
Department of Chemical Engineering
Delft University of Technology
The Netherlands

Atomic Layer Deposition of Zinc Glutarate Thin Films (25 minutes) Abstract

Leo D. Salmi
Laboratory of Inorganic Chemistry
Department of Chemistry
University of Helsinki
Finland

Bio-sketch